Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
8 articles.
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1. Plasma-Assisted Etching;Thin Film Processes;1991
2. Advances in vacuum contamination control for electronic materials processing;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1987-07
3. Turbomolecular pumps;Vacuum;1987-01
4. Metallization Techniques;VLSI Electronics Microstructure Science;1987
5. Design of plasma etching and deposition systems;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1986-05