Characterization of reactively evaporated SiOx thin films-Reference-Cited by-同舟云学术

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Characterization of reactively evaporated SiOx thin films

Published:1987-01 Issue:1 Volume:5 Page:106-109
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

O’Leary Michael J.,Thomas J. H.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.574142

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Superficial Si nanostructure synthesis by low-energy ion-beam-induced phase separation;Applied Surface Science;2022-11

2. Study of SiO${}_{{{x}}}$ (1 < x lt; 2) Thin-Film Optical Waveguides;Journal of Lightwave Technology;2016-11-01

3. Design of SiOx slab optical waveguides;SPIE Proceedings;2015-08-21

4. SiOx Nanoparticles Synthesized by an Evaporation and Condensation Process Using Induction Melting of Silicon and Gas Injection;Journal of Nanoscience and Nanotechnology;2013-05-01

5. Effects of hydrogen gas injection on the properties of SiO x nanoparticles synthesized by using an evaporation and condensation process;Journal of the Korean Physical Society;2013-02

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