Photoelectron spectroscopy studies of plasma-fluorinated epitaxial graphene-Reference-Cited by-同舟云学术

Photoelectron spectroscopy studies of plasma-fluorinated epitaxial graphene

Published:2012-05 Issue:3 Volume:30 Page:03D102
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Sherpa Sonam D.,Paniagua Sergio A.,Levitin Galit,Marder Seth R.,Williams M. D.,Hess Dennis W.

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3688760

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