In situ electrical determination of reaction kinetics and interface properties at molecular beam epitaxy grown metal/semiconductor interfaces
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Published:1999
Issue:4
Volume:17
Page:1877
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Chen L. C.,Palmstro̸m C. J.
Publisher
American Vacuum Society
Subject
General Engineering