Design of fast deflection coils for an electron‐beam microfabrication system-Reference-Cited by-同舟云学术

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Design of fast deflection coils for an electron‐beam microfabrication system

Published:1975-11 Issue:6 Volume:12 Page:1152-1155
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Amboss K.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.568479

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Notes and References;Principles of Electron Optics;2018

2. Notes and References for Volume 2;Principles of Electron Optics;1996

3. On the research of a post-lens deflector for a submicrometer lithography system;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1995-09

4. Notes and References;Principles of Electron Optics;1989

5. Calibrated deflection system for electron beam testing;Microelectronic Engineering;1987-01

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