Pattern-generation and pattern-transfer for single-digit nano devices-Reference-Cited by-同舟云学术

Pattern-generation and pattern-transfer for single-digit nano devices

Published:2016-11 Issue:6 Volume:34 Page:06K202
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Rangelow Ivo W.¹,Ahmad Ahmad¹,Ivanov Tzvetan¹,Kaestner Marcus¹,Krivoshapkina Yana¹,Angelov Tihomir¹,Lenk Steve¹,Lenk Claudia¹,Ishchuk Valentyn¹,Hofmann Martin¹,Nechepurenko Diana¹,Atanasov Ivaylo¹,Volland Burkhard¹,Guliyev Elshad¹,Durrani Zahid²,Jones Mervyn²,Wang Chen²,Liu Dixi²,Reum Alexander³,Holz Mathias³,Nikolov Nikolay⁴,Majstrzyk Wojciech⁵,Gotszalk Teodor⁵,Staaks Daniel⁶,Dallorto Stefano⁶,Olynick Deirdre L.⁶

Affiliation:

1. Department of Micro- and Nanoelectronic Systems (MNES), Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoff-Str. 1, 98693 Ilmenau, Germany

2. Department of Electrical and Electronic Engineering, Imperial College London, South Kensington, London SW7 2AZ, United Kingdom

3. Nano Analytik GmbH, Ehrenbergstraße 11, 98693 Ilmenau, Germany

4. Mikrosistemi Ltd., 9010 Varna, Bulgaria

5. Faculty of Micorsystems Electronics and Photonics, Wrocław University of Science and Technology, Wybrzeze Wyspianskiego 27, Wrocław 50-370, Poland

6. Molecular Foundry, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720

Funder

U.S. Department of Energy

Seventh Framework Programme

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4966556

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