1. Research Institute of Physics and Technology, Lobachevsky University, Nizhny Novgorod 603950, Russia
2. Chuvash State Agricultural Academy, Cheboksary 428017, Russia
3. Research and Development Center for Advanced Technologies in Microelectronics, Tomsk State University, Tomsk 634050, Russia
4. Ion Implantation Laboratory, Institute of Physics—Federal University of Rio Grande do Sul, Porto Alegre 91501-970, Brazil
5. Department of Electrical Engineering, Indian Institute of Technology Jodhpur, Jodhpur 342037, India
6. Centre for Materials Science and Nanotechnology, University of Oslo, Blindern, 0316 Oslo, Norway