Time‐resolved Fourier transform infrared emission as a plasma diagnostic
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.579619
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1. Mid infrared emission spectroscopy of carbon plasma;Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy;2017-01
2. Gas temperature gradients in a CF4 inductive discharge;Journal of Applied Physics;2002-10-15
3. Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002-01
4. Infrared Spectroscopy;Analytical Chemistry;1998-04-24
5. A Guide to Laser-Induced Fluorescence Diagnostics in Plasmas;Le Journal de Physique IV;1997-10
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