The effect of added salts on the optical properties of water for high index immersion lithography fluids-Reference-Cited by-同舟云学术

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The effect of added salts on the optical properties of water for high index immersion lithography fluids

Published:2008 Issue:2 Volume:26 Page:506
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Taylor J. Christopher,Costner Elizabeth A.,Goh Sumarlin,Wojtczak William,Dewulf Dean,Willson C. Grant

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Advances in Patterning Materials for 193 nm Immersion Lithography;Chemical Reviews;2010-01-13

2. Immersion Lithography: Photomask and Wafer-Level Materials;Annual Review of Materials Research;2009-08-01

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