Formation of nanocrystals in a-Si thin films induced by pulsed laser ultraviolet irradiation
-
Published:1997-07
Issue:4
Volume:15
Page:1445
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:
-
Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering