Fabrication of photonic crystals using a spin-coated hydrogen silsesquioxane hard mask
Author:
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Application of Machine Learning for Accurate Detection of Hemoglobin Concentrations Employing Defected 1D Photonic Crystal;Silicon;2022-05-10
2. Study of Proximity Effects in HSQ e-Beam Resist on TiO2 Thin Film;2020 13th International Conference on Advanced Semiconductor Devices And Microsystems (ASDAM);2020-10-11
3. Effect of spin-coated i-layer properties on electrical and optical characteristics of p-i-n structured all-Silicon Quantum Dot Solar Cell;Materials Today: Proceedings;2017
4. Modeling of novel hybrid photonic crystal structures involving cured hydrogen silsesquioxane pillars for improving the light extraction in light-emitting diodes;SPIE Proceedings;2016-03-08
5. Fabrication of a resist pattern based on plasma–polystyrene interactions;RSC Advances;2016
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