Damage investigation in AlGaAs and InGaP exposed to high ion density Ar and SF6 plasmas-Reference-Cited by-同舟云学术

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Damage investigation in AlGaAs and InGaP exposed to high ion density Ar and SF6 plasmas

Published:1997-05 Issue:3 Volume:15 Page:890-893
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Lee J. W.,Lee K. N.,Stradtmann R. R.,Abernathy C. R.,Pearton S. J.,Hobson W. S.,Ren F.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580727

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Anomalous Enhancement of In-Diffusion of Plasma-Induced Defects in GaN upon Ultraviolet-Light Irradiation;Japanese Journal of Applied Physics;2013-08-01

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