Plasma assisted low temperature electron beam deposited NiO thin films for electro-optic applications-Reference-Cited by-同舟云学术

Plasma assisted low temperature electron beam deposited NiO thin films for electro-optic applications

Published:2018-05 Issue:3 Volume:36 Page:031501
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Cosar Mustafa Burak¹,Icli Kerem Cagatay²,Ozenbas Macit³

Affiliation:

1. Metallurgical and Materials Engineering Department, Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, 06800 Cankaya, Ankara, Turkey; Microelectronics, Guidance and Electro-Optics Division, Aselsan Inc., Cankırı Yolu 7. Km, 06750 Akyurt, Ankara, Turkey; and Center for Solar Energy Research and Applications (GUNAM), Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, 06800 Cankaya, Ankara, Turkey

2. Center for Solar Energy Research and Applications (GUNAM), Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, 06800 Cankaya, Ankara, Turkey and Micro and Nanotechnology Graduate Program, Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, 06800 Cankaya, Ankara, Turkey

3. Metallurgical and Materials Engineering Department, Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, 06800 Cankaya, Ankara, Turkey and Center for Solar Energy Research and Applications (GUNAM), Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, 06800 Cankaya, Ankara, Turkey

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5013126

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