Deposition of WN[sub x]C[sub y] for diffusion barrier application using the imido guanidinato complex W(N[sup i]Pr)Cl[sub 3][[sup i]PrNC(NMe[sub 2])N[sup i]Pr]-Reference-Cited by-同舟云学术

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Deposition of WN[sub x]C[sub y] for diffusion barrier application using the imido guanidinato complex W(N[sup i]Pr)Cl[sub 3][[sup i]PrNC(NMe[sub 2])N[sup i]Pr]

Published:2008 Issue:5 Volume:26 Page:1800
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Ajmera Hiral M.,Heitsch Andrew T.,Anderson Timothy J.,Wilder Corey B.,Reitfort Laurel L.,McElwee-White Lisa,Norton David P.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spectroscopic evaluation of tungsten carbide-titanium carbide composite prepared by arc plasma melting;Journal of Electron Spectroscopy and Related Phenomena;2020-12

2. In Situ Investigation of the Thermal Decomposition of Cl 4 (CH 3 CN)W(N i Pr) During Simulated Chemical Vapor Deposition;European Journal of Inorganic Chemistry;2019-07-05

3. Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN x C y Thin Films;European Journal of Inorganic Chemistry;2018-01-03

4. Preparation of multi-phase composite of tungsten carbide, tungsten boride and carbon by arc plasma melting: characterization of melt-cast product;Ceramics International;2016-01

5. Synthesis of Mono-Imido Tungsten Complexes Directly from WCl6;ChemistrySelect;2016-01

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