Erratum: “Radio frequency line-plasma source using permanet magets” [J. Vac. Sci. Technol. A 22, L7 (2004)]
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Published:2005-01
Issue:1
Volume:23
Page:218-218
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Sakawa Y.,Yano K.,Shoji T.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics