Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO-Reference-Cited by-同舟云学术

Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO

Published:2018-11 Issue:6 Volume:36 Page:06A102
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Prodanovic´ Violeta¹²,Chan Hong Wah¹²,Mane Anil U.³,Elam Jeffrey W.³,Minjauw Matthias M.⁴,Detavernier Christophe⁴,van der Graaf Harry²,Sarro Pasqualina M.¹

Affiliation:

1. Electronic Components, Technology and Materials (ECTM), Delft University of Technology, Feldmannweg 17, 2628 CT Delft, The Netherlands

2. National Institute for Subatomic Physics (Nikhef), Science Park 105, 1098 XG Amsterdam, The Netherlands

3. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439

4. Department of Solid-State Physics, Ghent University, 9000 Ghent, Belgium

Funder

FP7 Ideas: European Research Council

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5040813

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The construction and characterization of MgO transmission dynodes;Journal of Instrumentation;2023-06-01

2. Ultra-thin corrugated metamaterial film as large-area transmission dynode;Journal of Instrumentation;2022-09-01

3. Secondary electron emission of Al<sub>2</sub>O<sub>3</sub> and MgO nanofilms fabricated by atomic layer deposition;Chinese Science Bulletin;2022-05-06

4. Surface Zeta Potential of ALD-Grown Metal-Oxide Films;Langmuir;2021-09-23

5. Secondary electron emission from multi-layered TiN/Al2O3 transmission dynodes;Journal of Instrumentation;2021-07-01