Stabilization of an electrostatic lens for a focused ion beam system-Reference-Cited by-同舟云学术

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Stabilization of an electrostatic lens for a focused ion beam system

Published:1988-05 Issue:3 Volume:6 Page:958
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Aihara R.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Notes and References;Principles of Electron Optics;2018

2. Electrostatic Lenses;Handbook of Charged Particle Optics, Second Edition;2008-10-24

3. Focused ion beam technology;Semiconductor Science and Technology;1993-06-02

4. Development of focused ion beam systems;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02

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