Electrical resistivity and mechanical properties of nitrogen-containing diamondlike carbon/tungsten and nitrogen-containing diamondlike carbon/tungsten carbide multilayer films prepared under low substrate temperature-Reference-Cited by-同舟云学术

Electrical resistivity and mechanical properties of nitrogen-containing diamondlike carbon/tungsten and nitrogen-containing diamondlike carbon/tungsten carbide multilayer films prepared under low substrate temperature

Published:2020-01 Issue:1 Volume:38 Page:011801
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Tamekuni Koki¹,Harigai Toru¹,Toya Takafumi¹,Takikawa Hirofumi¹,Tanimoto Tsuyoshi²,Takago Shigeki³,Yasui Haruyuki³,Kaneko Satoru⁴,Kunitsugu Shinsuke⁵,Kamiya Masao⁶,Taki Makoto⁷,Gonda Hidenobu⁸

Affiliation:

1. Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 4418580, Japan

2. National Institute of Technology, Kochi College, 200-1 Monobe, Nankoku, Kochi 7838508, Japan

3. Industrial Research Institute of Ishikawa, 2-1 Shunsuki, Kanazawa, Ishikawa 9208203, Japan

4. Kanagawa Institute of Industrial Science and Technology, 705-1 Shimoimaizumi, Ebina, Kanagawa 2430435, Japan

5. Industrial Technology Center of Okayama Prefecture, 5301 Yoshiga, Kitaku, Okayama, Okayama 7011296, Japan

6. Itoh Optical Industrial Co., Ltd., 3-19 Miyanarityo, Gamagori, Aichi 443004, Japan

7. Onward Ceramic Coating Co., Ltd., wa-13 Yoshiharatyo, Nomi, Ishikawa 9290111, Japan

8. OSG Coating Service Co., Ltd., 149 Ichinomiyamae, Toyokawa, Aichi 4411231, Japan

Funder

JSPS KAKENHI

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5129700