Author:
Stengl G.,Kaitna R.,Löschner H.,Rieder R.,Wolf P.,Sacher R.
Cited by
14 articles.
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1. Proton Beam Writing: A New 3D Nanolithographic Technique;Ion Beams in Nanoscience and Technology;2009
2. Lithography;Technology of Integrated Circuits;2000
3. Lithographie;Halbleiter-Elektronik;1996
4. The Physics of Ion-Beam Lithography;The Physics of Submicron Lithography;1992
5. Fabrication Techniques for Submicron Devices;Physics of Submicron Devices;1991