Selective wet etching for highly uniform GaAs/Al[sub 0.15]Ga[sub 0.85]As heterostructure field effect transistors
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Study on flawed surface of GaAs epitaxial wafer in the process of wet chemical etching;SPIE Proceedings;2017-03-08
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4. Chemical polishing method of GaAs specimens for transmission electron microscopy;Micron;2010-01
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