Electron-beam induced etching of resist with water vapor as the etching medium
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Altering the radiation chemistry of electron-beam lithography with a reactive gas: a study of Teflon AF patterning under water vapor;Nanotechnology;2019-05-01
2. Electron Beam-Induced Carbon Erosion and the Impact on Electron Probe Microanalysis;Microscopy and Microanalysis;2018-11-16
3. 3D Nanofluidic Channels Shaped by Electron-Beam-Induced Etching;Small;2012-03-14
4. Contamination-free imaging by electron induced carbon volatilization in environmental scanning electron microscopy;Journal of Applied Physics;2009-08
5. Single-crystal nanowires grown via electron-beam-induced deposition;Nanotechnology;2008-07-16
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