Use of discharge intensity for evaluation of pumping characteristics of a sputter ion pump-Reference-Cited by-同舟云学术

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Use of discharge intensity for evaluation of pumping characteristics of a sputter ion pump

Published:1984-04 Issue:2 Volume:2 Page:195-197
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Pierini M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.572721

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sputter-ion pumps for ultrahigh-vacuum use;A Review: Ultrahigh-Vacuum Technology for Electron Microscopes;2020

2. Methods for measuring outgassing rates;A Review: Ultrahigh-Vacuum Technology for Electron Microscopes;2020

3. Influence of cathode geometry on discharge characteristics of magnetron-type discharge cells;Vacuum;2005-10

4. AES investigation of anode deposits in magnetron-type sputter ion pump;Applied Surface Science;2005-06

5. Discharge characteristics of a magnetron cell in ultrahigh vacuum;Vacuum;2002-09

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