Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers-Reference-Cited by-同舟云学术

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Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers

Published:2004 Issue:1 Volume:22 Page:104
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Sekine Yoshiyuki,Suzuki Akiyoshi,Hasegawa Masanobu,Ouchi Chidane,Hara Shinichi,Hasegawa Takayuki,Kuramoto Yoshiyuki,Kato Seima,Murakami Katsuhiko,Saito Jun,Ota Kazuya,Kondo Hiroyuki,Ishii Mikihiko,Kawakami Jun,Oshino Tetsuya,Sugisaki Katsumi,Zhu Yucong,Otaki Katsura,Liu Zhiqiang

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of the pinhole diffraction based on the waveguide effect in a point diffraction interferometer;Applied Optics;2018-01-30

2. The waveguide effect on the diffraction wave in pinhole point diffraction interferometer;AOPC 2017: Optical Sensing and Imaging Technology and Applications;2017-10-24

3. Point diffraction in terference detection technology;Chinese Optics;2017

4. High-precision three-dimensional coordinate measurement with subwavelength-aperture-fiber point diffraction interferometer;SPIE Proceedings;2014-11-05

5. Vector simulation of pinhole diffraction behavior for high numerical aperture converging incident beam at deep ultraviolet wavelength;SPIE Proceedings;2014-08-21

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