Thickness and density evaluation for nanostructured thin films by glancing angle deposition-Reference-Cited by-同舟云学术

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Thickness and density evaluation for nanostructured thin films by glancing angle deposition

Published:2005 Issue:6 Volume:23 Page:2545
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Buzea Cristina,Kaminska Kate,Beydaghyan Gisia,Brown Tim,Elliott Chelsea,Dean Cory,Robbie Kevin

Publisher

American Vacuum Society

Subject

General Engineering

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