Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
3 articles.
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1. Wet chemical cleaning of plasma oxide grown on heated (001) InP surfaces;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004
2. CH[sub 4]/H[sub 2] reactive ion etching induced damage of InP;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
3. Fast migration of plasma-induced defects in p-InP;Conference Proceedings. 2001 International Conference on Indium Phosphide and Related Materials. 13th IPRM (Cat. No.01CH37198)