Comparison of high resolution negative electron beam resists-Reference-Cited by-同舟云学术

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Comparison of high resolution negative electron beam resists

Published:2006 Issue:4 Volume:24 Page:1776
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Bilenberg B.,Scho̸ler M.,Shi P.,Schmidt M. S.,Bo̸ggild P.,Fink M.,Schuster C.,Reuther F.,Gruetzner C.,Kristensen A.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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