Growth characteristics of ZnO thin films produced via catalytic reaction-assisted chemical vapor deposition-Reference-Cited by-同舟云学术

Growth characteristics of ZnO thin films produced via catalytic reaction-assisted chemical vapor deposition

Published:2019-05 Issue:3 Volume:37 Page:030904
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Saito Taro¹,Iba Ryuta¹,Ono Shotaro¹,Imada Go²,Yasui Kanji¹

Affiliation:

1. Department of Electrical, Electronics and Information Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

2. Department of Engineering, Niigata Institute of Technology, 1719 Hujihashi, Kashiwazaki, Niigata 945-1195, Japan

Funder

Kakenhi Grant-in-Aid for Scientefic Research

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5079526

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