Characterization of thin film adhesion by MEMS shaft-loading blister testing-Reference-Cited by-同舟云学术

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Characterization of thin film adhesion by MEMS shaft-loading blister testing

Published:2013-05 Issue:3 Volume:31 Page:031102
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Berdova Maria,Lyytinen Jussi,Grigoras Kestutis,Baby Anu,Kilpi Lauri,Ronkainen Helena,Franssila Sami,Koskinen Jari

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4801921

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Recent Progress in Contact Probing Methods of Two-Dimensional Materials and Van Der Waals Heterostructures;Frontiers in Mechanical Engineering;2022-06-14

3. Measurement of Adhesion of In Situ Electrospun Nanofibers on Different Substrates by a Direct Pulling Method;Advances in Materials Science and Engineering;2020-03-27

4. Implantable Neural Interfaces and Wearable Tactile Systems for Bidirectional Neuroprosthetics Systems;Advanced Healthcare Materials;2019-11-25

5. Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique;Japanese Journal of Applied Physics;2019-07-01

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