Properties of carbon coating films produced by electron cyclotron resonance plasmas-Reference-Cited by-同舟云学术

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Properties of carbon coating films produced by electron cyclotron resonance plasmas

Published:1987-07 Issue:4 Volume:5 Page:2293-2296
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Minagawa H.,Hino T.,Yamashina T.,Amemiya H.,Ishibe Y.,Kato S.,Okazaki K.,Oyama H.,Sakamoto Y.,Yano K.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.574438

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Properties of carbon films produced by R.F. Plasma chemical vapour deposition;Surface and Coatings Technology;1990-12

2. PROPERTIES OF CARBON FILMS PRODUCED BY R.F. PLASMA CHEMICAL VAPOUR DEPOSITION;Metallurgical Coatings and Thin Films 1990;1990

3. Study on carbon coating films produced in Heliotron-E;Journal of Nuclear Materials;1989-04

4. COMPARISON IN STRUCTURE AND PROPERTY OF CARBON FILMS PRODUCED BY VARIOUS PLASMAS;Fusion Technology 1988;1989

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