Si metal–oxide semiconductor field effect transistor with 70-nm slotted gates for study of quasi-one-dimensional quantum transport
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Published:1988-11
Issue:6
Volume:6
Page:1841
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Scott-Thomas J. H. F.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
17 articles.
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