Area-selective atomic layer deposition of molybdenum oxide-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Area-selective atomic layer deposition of molybdenum oxide

Published:2020-07 Issue:4 Volume:38 Page:042406
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kvalvik Julie Nitsche¹^ORCID,Borgersen Jon²^ORCID,Hansen Per-Anders¹^ORCID,Nilsen Ola¹^ORCID

Affiliation:

1. Centre for Materials Science and Nanotechnology, Department of Chemistry, University of Oslo, Postboks 1033, Blindern, 0315 Oslo, Norway

2. Centre for Materials Science and Nanotechnology, Department of Physics, University of Oslo, Postboks 1048, Blindern, 0315 Oslo, Norway

Funder

Research council of Norway

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000219

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of MoO3 and TixMoyOz Thin Films Prepared by Atomic Layer Deposition;Russian Journal of Inorganic Chemistry;2024-03-11

2. Growth of Aluminum Molybdenum Oxide Films by Atomic Layer Deposition with Using Trimethylaluminum, Molybdenum Oxytetrachloride, and Water;Inorganic Materials;2023-04

3. Атомно-слоевое осаждение алюминий-молибденовых оксидных пленок с использованием триметилалюминия, оксотетрахлорида молибдена и воды;Неорганические материалы;2023-04-01

4. Studying the Atomic Layer Deposition of Molybdenum Oxide and Titanium–Molybdenum Oxide Films Using Quartz Crystal Microbalance;Russian Journal of Physical Chemistry A;2022-10

5. Substrate temperature-controlled precursor reaction mechanism of PEALD-deposited MoOx thin films;Journal of Materials Science;2022-06-30

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3