Model of bias sputtering in a dc‐triode configuration applied to the production of Pd films
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Published:1982-09
Issue:3
Volume:21
Page:828-832
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Ziemann P.,Kay E.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
35 articles.
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