Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Automated geometry assisted proximity effect correction for electron beam direct write nanolithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11
2. Nanoscale geometry assisted proximity effect correction for electron beam direct write nanolithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009