Fabrication and characterization of Si nanocrystals in SiC matrix produced by magnetron cosputtering-Reference-Cited by-同舟云学术

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Fabrication and characterization of Si nanocrystals in SiC matrix produced by magnetron cosputtering

Published:2007 Issue:4 Volume:25 Page:1327
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Song Dengyuan,Cho Eun-Chel,Conibeer Gavin,Cho Young-Hyun,Huang Yidan,Huang Shujuan,Flynn Chris,Green Martin A.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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