1. Microroughness Reduction of Tungsten Films by Laser Polishing Technology with a Line Beam;Japanese Journal of Applied Physics;2004-04-09
2. Patterning of magnetron sputtered SmCo films by excimer laser ablation;Nano- and Microtechnology: Materials, Processes, Packaging, and Systems;2002-11-01
3. Simulations of metal thin film thermal flow processes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-07
4. Pulsed Laser Planarization of Metals for IC Interconnect;MRS Proceedings;1991
5. Process margins for pulsed laser-induced via filling;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-11