Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
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Published:2021-12
Issue:6
Volume:39
Page:062603
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ISSN:2166-2746
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Container-title:Journal of Vacuum Science & Technology B
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language:en
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Short-container-title:Journal of Vacuum Science & Technology B
Author:
Sasidharan Vineeth1,
Neumann Alexander1,
Brueck S. R. J.1ORCID
Affiliation:
1. Center for High Technology Materials, Electrical and Computer Engineering Department, University of New Mexico, Albuquerque, New Mexico 87106
Funder
Directorate for Engineering
Division of Civil, Mechanical and Manufacturing Innovation
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials