Fabrication of planar silicon nanowires on silicon-on-insulator using stress limited oxidation-Reference-Cited by-同舟云学术

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Fabrication of planar silicon nanowires on silicon-on-insulator using stress limited oxidation

Published:1997-11 Issue:6 Volume:15 Page:2825
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Kedzierski Jakub

Publisher

American Vacuum Society

Subject

General Engineering

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