On the design and characterization of a novel arsine cracking furnace utilizing catalytic decomposition of AsH3 to yield a purely monomeric source of arsenic for molecular beam epitaxial growth of GaAs
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Published:1984
Issue:2
Volume:2
Page:280
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
16 articles.
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