XPS analysis and electrical conduction mechanisms of atomic layer deposition grown Ta2O5 thin films onto p-Si substrates-Reference-Cited by-同舟云学术

XPS analysis and electrical conduction mechanisms of atomic layer deposition grown Ta2O5 thin films onto p-Si substrates

Published:2020-05 Issue:3 Volume:38 Page:032402
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Korkos Spyridon¹,Xanthopoulos Nikolaos J.¹,Botzakaki Martha A.¹^ORCID,Drivas Charalampos²^ORCID,Kennou Styliani²,Ladas Spyridon²,Travlos Anastasios³,Georga Stavroula N.¹,Krontiras Christoforos A.¹

Affiliation:

1. Department of Physics, University of Patras, 26504 Patras, Greece

2. Department of Chemical Engineering, University of Patras, 26504 Patras, Greece

3. Institute of Nanoscience and Nanotechnology, National Center for Scientific Research “Demokritos,” 153 10 Aghia Paraskevi Attikis, Athens, Greece

Funder

European Unionand Greek National funds

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5134764

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