Apparatus for deposition of composition spread alloy films: The rotatable shadow mask-Reference-Cited by-同舟云学术

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Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Published:2012-11 Issue:6 Volume:30 Page:061511
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Fleutot Benoit,Miller James B.,Gellman Andrew J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4766194

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