Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system-Reference-Cited by-同舟云学术

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Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system

Published:2009-05 Issue:3 Volume:27 Page:465-470
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Suzuki Katsumasa,Ishihara Yoshio,Sakoda Kaoru,Shirai Yasuyuki,Teramoto Akinobu,Hirayama Masaki,Ohmi Tadahiro,Watanabe Takayuki,Ito Takashi

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3106612

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor;Plasma Chemistry and Plasma Processing;2016-08-30

2. Abatement characteristics of N2O in low-pressure plasma reactor;Plasma Sources Science and Technology;2015-12-14

3. Low-Pressure Plasma After-Treatment of Pollutants Emitted During Semiconductor Manufacturing;Plasma Processes and Polymers;2015-05-21

4. Abatement of CF4 and CHF3 byproducts using low-pressure plasmas generated by annular-shaped electrodes;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-03

5. AC Low-pressure Plasmas Generated by Using Annular-shaped Electrodes for Abatement of Pollutants Emitted during Semiconductor Manufacturing Processes;Journal of the Korean Physical Society;2011-10-14

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