Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process-Reference-Cited by-同舟云学术

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Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Published:2020-03 Issue:2 Volume:38 Page:022418
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kim Sun Jung¹^ORCID,Yong Sang Heon¹,Choi You Jin¹,Hwangbo Hyeok¹,Yang Woo-Young²,Chae Heeyeop¹³

Affiliation:

1. School of Chemical Engineering, Sungkyunkwan University (SKKU), Suwon 16419, South Korea

2. Samsung Advanced Institute of Technology, 130, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do 16678, South Korea

3. SKKU Advanced Institute of Nanotechnology (SAINT), Suwon 16419, South Korea

Funder

National Research Foundation of Korea

Ministry of Trade, Industry and Energy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5130727

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1. Efforts of implementing ultra‐flexible thin‐film encapsulation for optoelectronic devices based on atomic layer deposition technology;SmartMat;2024-04-16

2. Recent Achievements for Flexible Encapsulation Films Based on Atomic/Molecular Layer Deposition;Micromachines;2024-03-30

3. Water vapor permeation in amorphous/polycrystalline inorganic layers on polyethylene terephthalate substrates;Thin Solid Films;2022-12

4. Recent Advances in Materials Design Using Atomic Layer Deposition for Energy Applications;Advanced Functional Materials;2021-12-06

5. High-quality remote plasma enhanced atomic layer deposition of aluminum oxide thin films for nanoelectronics applications;Solid-State Electronics;2021-11

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