Improvement of electrostatic lenses for ion beam lithography
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 24 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Notes and References;Principles of Electron Optics;2018
2. Electron Optics of Low-Voltage Electron Beam Testing and Inspection. Part I: Simulation Tools ✶ ✶Reprinted from Advances in Optical and Electron Microscopy, vol. 13, 1994, 123–242.;Advances in Imaging and Electron Physics;2018
3. Electrostatic Lenses;Handbook of Charged Particle Optics, Second Edition;2008-10-24
4. Electrostatic accel–decel lens with the advantage of reduced chromatic aberration;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01
5. Design optimization for two lens focused ion beam columns;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-07
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