Effect of Al ion implantation on the adhesion of Al films to SiO2 substrates
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Published:1996-09
Issue:5
Volume:14
Page:2905-2908
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Su X. W.,Yang J.,Zhang Q. Y.,Cui F. Z.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics