Hybrid e‐beam/deep UV exposure using portable conformable masking (PCM) technique
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Published:1979-11
Issue:6
Volume:16
Page:1669-1671
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Lin B. J.,Chang T. H. P.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
47 articles.
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