Ionization Gauge Calibration System Using a Porous Plug and Orifice
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Published:1965-05
Issue:3
Volume:2
Page:104-108
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
28 articles.
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1. Soft Calibration Technique with SVM for Intelligent Flow Measurement;Lecture Notes in Electrical Engineering;2015
2. Porous plug made of tungsten wires and its conductance;Vacuum;1991-01
3. References;Vacuum Technology;1990
4. Gauge calibration;Total and Partial Pressure Measurement in Vacuum Systems;1989
5. Use of porous plugs in the transition flow range for the calibration of vacuum gauges;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1988-05