Multiple-layer blank structure for phase-shifting mask fabrication
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Published:1996-01
Issue:1
Volume:14
Page:63
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Pierrat Christophe
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
12 articles.
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