Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]-Reference-Cited by-同舟云学术

Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]

Published:2020-05 Issue:3 Volume:38 Page:037001
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Parsons Gregory N.¹^ORCID,Elam Jeffrey W.²,George Steven M.³^ORCID,Haukka Suvi⁴,Jeon Hyeongtag⁵^ORCID,(Erwin) Kessels W. M. M.⁶^ORCID,Leskelä Markku⁷^ORCID,Poodt Paul⁸,Ritala Mikko⁷^ORCID,Rossnagel Steven M.⁹

Affiliation:

1. Department of Chemical and Biomolecular Engineering, North Carolina State University, Raleigh, North Carolina 27695

2. Argonne National Laboratory, Argonne, Illinois 60439

3. Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309

4. ASM Microchemistry Ltd., FI-00560 Helsinki, Finland

5. Division of Materials Science & Engineering, Hanyang University, Seoul 133-791, South Korea

6. Department of Applied Physics, Eindhoven University of Technology, NL-5600 MB Eindhoven, The Netherlands

7. Department of Chemistry, University of Helsinki, FI-00014 Helsinki, Finland

8. Holst Centre/TNO, P. O. Box 6235, 5600 HE Eindhoven, The Netherlands

9. IBM TJ Watson Research Center, Yorktown Heights, New York 10598

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000143

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