Graded refractive index silicon oxynitride thin film characterized by spectroscopic ellipsometry-Reference-Cited by-同舟云学术

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Graded refractive index silicon oxynitride thin film characterized by spectroscopic ellipsometry

Published:1992-07 Issue:4 Volume:10 Page:1462-1466
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Snyder Paul G.,Xiong Yi‐Ming,Woollam John A.,Al‐Jumaily Ghanim A.,Gagliardi F. J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578266

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