Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films-Reference-Cited by-同舟云学术

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Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films

Published:2018-09 Issue:5 Volume:36 Page:051512
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kindlund Hanna¹,Lu Jun¹,Broitman Esteban¹,Petrov Ivan¹²,Greene J. E.¹²,Birch Jens¹,Hultman Lars¹

Affiliation:

1. Thin Film Physics Division, Department of Physics (IFM), Linköping University, SE-58183 Linköping, Sweden

2. Department of Materials Science, Fredrick Seitz Materials Research Laboratory, University of Illinois, 104 South Goodwin, Urbana, Illinois 61801

Funder

SFO Mat-LiU

Swedish Research Council

Knut och Alice Wallenbergs Stiftelse

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5045048

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